µWire AeroBar®

The Model 5225S Digital Aerobar Standalone Ionizing Bar is specifically designed to provide high performance with ease of integration and operation. A choice of ionization modes, output voltage and timing provides versatility to meet static charge neutralization requirements.

• All parameters are stored in the aerobar
• Fully adjustable parameters in Pulsed DC or
  Steady-state DC
• Ion current monitoring
• Ionization can be adjusted to the individual requirement for static charging
• Uniform ion production
• Alarm function for secured power
• Ultra-clean emitter dot material with no risk of wafer contamination from dopants or metals
• Ozone generation <0.005 ppm

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